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Project TURO
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Mebarki et al., U. S.
Patent 8,084,310, ****igned to
Applied Materials. M. C.
Smayling et al., Proc. SPIE 8683, 868305 (2013). J. M. Park et al., IEDM 2015, 676...
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Deposition &
Direct Etch".
Solid State Technology.
November 14, 2016.
Smayling,
Michael C. (September 9, 2013). "1D
design style implications for mask...
- 1103/RevModPhys.59.S1. F.K. ****el; G. Marowsky; W.L.
Wilson Jr. & M.C.
Smayling (1981). "Electron beam
pumped broad-band
diatomic and
triatomic excimer...
