- A
photoresist (also
known simply as a resist) is a light-sensitive
material used in
several processes, such as
photolithography and photoengraving, to...
- material,
called a
photoresist,
being applied to the substrate. A
photomask that
contains the
desired pattern is then
placed over the
photoresist.
Light is shone...
- SU-8 is a
commonly used epoxy-based
negative photoresist.
Negative refers to a
photoresist whereby the
parts exposed to UV
become cross-linked, while...
-
process possible through the
combined use of
hexamethyldisilazane (HMDS),
photoresist (positive or negative), spin coating, photomask, an
exposure system and...
- techniques;
photoresist and non-
photoresist mastering.
Photoresist also
comes in two variations;
positive photoresist and
negative photoresist.
Photoresist mastering...
-
photomask in
direct contact with a
substrate coated with an
imaging photoresist layer. The
first integrated circuits had
features of 200 micrometres...
-
intensively in photolithography, to
deposit layers of
photoresist about 1
micrometre thick.
Photoresist is
typically spun at 20 to 80
revolutions per second...
- longer.
Curable materials are
widely used for medical, printing, and
photoresist technologies.
Changes in
structural and
chemical properties can be induced...
-
material which resists etching. In some cases, the
masking material is a
photoresist which has been
patterned using photolithography.
Other situations require...
- manufacturing,
including equipment for thin film deposition,
plasma etch,
photoresist strip, and
wafer cleaning processes.
Throughout semiconductor manufacturing...
