-
Photolithography (also
known as
optical lithography) is a
process used in the
manufacturing of
integrated circuits. It
involves using light to transfer...
-
Photolithography is a
process in
removing select portions of thin
films used in microfabrication.
Microfabrication is the
production of
parts on the micro-...
- in 1984. ASML
specializes in the
development and
manufacturing of
photolithography machines which are used to
produce computer chips. As of 2023[update]...
- "next generation" have
entered commercial production, and open-air
photolithography, with
visible light projected through hand-drawn photomasks, has gradually...
- film. It is emplo**** in many
fields of science,
manufacturing (e.g.,
photolithography), and business, as well as its more
direct uses for art, film and video...
- resist) is a light-sensitive
material used in
several processes, such as
photolithography and photoengraving, to form a
patterned coating on a surface. This...
- the
resolution attainable through photolithography. Com****tional
lithography came to the
forefront of
photolithography technologies in 2008 when the semiconductor...
- the 1960s,
excimer lasers have been
widely used in high-resolution
photolithography machines, one of the
critical technologies required for microelectronic...
- range. ArF (and KrF)
excimer lasers are
widely used in high-resolution
photolithography machines, a
critical technology for
microelectronic chip manufacturing...
- (EGS) or
other semiconductor (such as GaAs)
through processes such as
photolithography. The
wafer is cut (diced) into many pieces, each
containing one copy...
