Definition of PECVD. Meaning of PECVD. Synonyms of PECVD

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Definition of PECVD

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Meaning of PECVD from wikipedia

- Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid...
- (MPCVD) Plasma-enhanced CVD (PECVD) – CVD that utilizes plasma to enhance chemical reaction rates of the precursors. PECVD processing allows deposition...
- advantage is that a-Si can be deposited over large areas by PECVD. The design of the PECVD system has great impact on the production cost of such panel...
- annealing, together with advanced plasma-enhanced chemical vapor deposition (PECVD), could facilitate even higher degrees of conductivity. These techniques...
- tools: single-wafer plasma enhanced CVD (PECVD) and batch low pressure CVD (LPCVD). ASM provides single-wafer PECVD processes on the Dragon XP8 tool. ASM...
- chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), electrochemical deposition (ECD), ultraviolet...
- categories: Plasma etching systems (RIE, ICP, DRIE) Plasma deposition systems (PECVD and LS-CVD®) Surface treatment systems (plasma cleaners, UV-Ozone cleaners)...
- (NIOSH). Bulla, D.A.P; Morimoto, N.I (1998). "Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications". Thin...
- equipment used in solar panel production. Its product portfolio includes PECVD coating plants. "Next step taken in integration process within Meyer Burger...
- Formation of silicon oxide layers in the semiconductor industry. LPCVD and PECVD method in comparison. Stress prevention. Quartz (SiO2) piezoelectric properties...