-
Microlithography is a
general name for any
manufacturing process that can
create a
minutely patterned thin film of
protective materials over a substrate...
-
extremely clean operating conditions.
Photolithography is a
subclass of
microlithography, the
general term for
processes that
generate patterned thin films...
- and is used for high-precision
applications in
telescope optics,
microlithography machines and
inertial navigation systems. The main
applications for...
- Calma,
February 1987 SPIE
Handbook of
Microlithography,
Micromachining and Microfabrication, Vol. 1:
Microlithography // Bellingham, Wash. : SPIE Optical...
- wet,
cryogenic or
other chemistry techniques. The
company also sold
microlithography systems using photoresist processes. The
company provides upgrade,...
- phase-shifting masks". In Wiley,
James N. (ed.). 10th
Annual Symp on
Microlithography. Vol. 1496. pp. 27–53. doi:10.1117/12.29750. S2CID 109009678. Eom,...
-
extensions for the ****ure". Proc. SPIE 5377,
Optical Microlithography XVII.
Optical Microlithography XVII. 5377: 1. Bibcode:2004SPIE.5377....1S. doi:10...
-
substrate (e.g. wafer) by
means of UV
radiation or
electron beam. In
microlithography,
typically UV
radiation casts an
image of a time
constant mask onto...
-
Prosenjit (Ed.) (1997).
Handbook of
Microlithography, Micromachining, and Microfabrication.
Volume 1:
Microlithography. SPIE Press. p. 83. Benschop, Jos;...
- Rooks, M.J. (2000). "2.
Electron beam lithography".
Microlithography. SPIE
Handbook of
Microlithography,
Micromachining and Microfabrication. Vol. 1. Archived...
